Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate
2008-03-25
2008-03-25
Morgan, Eileen P. (Department: 3723)
Abrading
Abrading process
Utilizing fluent abradant
C451S041000, C451S060000, C451S397000, C451S398000
Reexamination Certificate
active
07347767
ABSTRACT:
Retaining rings and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces are disclosed herein. A carrier head configured in accordance with one embodiment of the invention can be used to retain a micro-device workpiece during mechanical or chemical-mechanical polishing. In this embodiment, the carrier head can include a retaining ring carried by a workpiece holder. The retaining ring can include an inner surface, an outer surface, and a base surface extending at least partially between the inner and outer surfaces. The retaining ring can further include at least one annular groove and a plurality of transverse grooves. The annular groove can be positioned adjacent to the base surface between the inner and outer surfaces. The plurality of transverse grooves can extend from the inner surface of the retaining ring to the annular groove in the base surface.
REFERENCES:
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5234867 (1993-08-01), Schultz et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: 5245790 (1993-09-01), Jerbic
patent: 5245796 (1993-09-01), Miller et al.
patent: RE34425 (1993-11-01), Schultz
patent: 5421769 (1995-06-01), Schultz et al.
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5533924 (1996-07-01), Stroupe et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5618381 (1997-04-01), Doan et al.
patent: 5643060 (1997-07-01), Sandhu et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5664988 (1997-09-01), Stroupe et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5695392 (1997-12-01), Kim
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5747386 (1998-05-01), Moore
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5895550 (1999-04-01), Andreas
patent: 5930699 (1999-07-01), Bhatia
patent: 5934980 (1999-08-01), Koos et al.
patent: 5944593 (1999-08-01), Chiu et al.
patent: 5945347 (1999-08-01), Wright
patent: 5954912 (1999-09-01), Moore
patent: 5967030 (1999-10-01), Blalock
patent: 5972792 (1999-10-01), Hudson
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6004193 (1999-12-01), Nagahara et al.
patent: 6039633 (2000-03-01), Chopra
patent: 6040245 (2000-03-01), Sandhu et al.
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6074286 (2000-06-01), Ball
patent: 6083085 (2000-07-01), Lankford
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6116988 (2000-09-01), Ball
patent: 6120354 (2000-09-01), Koos et al.
patent: 6125255 (2000-09-01), Litman
patent: 6135856 (2000-10-01), Tjaden et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6143155 (2000-11-01), Adams et al.
patent: 6152808 (2000-11-01), Moore
patent: 6176992 (2001-01-01), Talieh
patent: 6180525 (2001-01-01), Morgan
patent: 6183350 (2001-02-01), Lin et al.
patent: 6187681 (2001-02-01), Moore
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6193588 (2001-02-01), Carlson et al.
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203404 (2001-03-01), Joslyn et al.
patent: 6203413 (2001-03-01), Skrovan
patent: 6206756 (2001-03-01), Chopra et al.
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 6218316 (2001-04-01), Marsh
patent: 6224472 (2001-05-01), Lai et al.
patent: 6227955 (2001-05-01), Custer et al.
patent: 6234874 (2001-05-01), Ball
patent: 6234877 (2001-05-01), Koos et al.
patent: 6234878 (2001-05-01), Moore
patent: 6237483 (2001-05-01), Blalock
patent: 6245193 (2001-06-01), Quek et al.
patent: 6250994 (2001-06-01), Chopra et al.
patent: 6251785 (2001-06-01), Wright
patent: 6261151 (2001-07-01), Sandhu et al.
patent: 6261163 (2001-07-01), Walker et al.
patent: 6267643 (2001-07-01), Teng et al.
patent: 6267650 (2001-07-01), Hembree
patent: 6267655 (2001-07-01), Weldon et al.
patent: 6273786 (2001-08-01), Chopra et al.
patent: 6273796 (2001-08-01), Moore
patent: 6276996 (2001-08-01), Chopra
patent: 6284660 (2001-09-01), Doan
patent: 6306012 (2001-10-01), Sabde
patent: 6306014 (2001-10-01), Walker et al.
patent: 6306768 (2001-10-01), Klein
patent: 6312558 (2001-11-01), Moore
patent: 6328632 (2001-12-01), Chopra
patent: 6331488 (2001-12-01), Doan et al.
patent: 6350180 (2002-02-01), Southwick
patent: 6350691 (2002-02-01), Lankford
patent: 6352466 (2002-03-01), Moore
patent: 6354923 (2002-03-01), Lankford
patent: 6354930 (2002-03-01), Moore
patent: 6358122 (2002-03-01), Sabde et al.
patent: 6358127 (2002-03-01), Carlson et al.
patent: 6358129 (2002-03-01), Dow
patent: 6361417 (2002-03-01), Walker et al.
patent: 6364757 (2002-04-01), Moore
patent: 6368190 (2002-04-01), Easter et al.
patent: 6368193 (2002-04-01), Carlson et al.
patent: 6368194 (2002-04-01), Sharples et al.
patent: 6368197 (2002-04-01), Elledge
patent: 6376381 (2002-04-01), Sabde
patent: 6383934 (2002-05-01), Sabde et al.
patent: 6387289 (2002-05-01), Wright
patent: 6395620 (2002-05-01), Pan et al.
patent: 6402884 (2002-06-01), Robinson et al.
patent: 6419567 (2002-07-01), Glashauser
patent: 6428386 (2002-08-01), Bartlett
patent: 6447369 (2002-09-01), Moore
patent: 6447380 (2002-09-01), Pham et al.
patent: 6498101 (2002-12-01), Wang
patent: 6511576 (2003-01-01), Klein
patent: 6520834 (2003-02-01), Marshall
patent: 6533893 (2003-03-01), Sabde et al.
patent: 6547640 (2003-04-01), Hofmann
patent: 6548407 (2003-04-01), Chopra et al.
patent: 6579799 (2003-06-01), Chopra et al.
patent: 6592443 (2003-07-01), Kramer et al.
patent: 6602121 (2003-08-01), Halley
patent: 6609947 (2003-08-01), Moore
patent: 6623329 (2003-09-01), Moore
patent: 6648734 (2003-11-01), Chin et al.
patent: 6652764 (2003-11-01), Blalock
patent: 6666749 (2003-12-01), Taylor
patent: 6821192 (2004-11-01), Donohue
patent: 6835125 (2004-12-01), Tseng et al.
patent: 6869335 (2005-03-01), Taylor
patent: 6962520 (2005-11-01), Taylor
patent: 7118456 (2006-10-01), Moloney et al.
patent: 2002/0017365 (2002-02-01), Gunji et al.
patent: 2002/0182867 (2002-12-01), Kajiwara et al.
patent: 2005/0037694 (2005-02-01), Taylor
patent: 2005/0113002 (2005-05-01), Chen et al.
patent: 2005/0266783 (2005-12-01), Taylor
patent: 2006/0137819 (2006-06-01), Manens et al.
U.S. Appl. No. 11/217,151, filed Aug. 31, 2005, Chandrasekaran.
Kondo, S. et al., “Abrasive-Free Polishing for Copper Damascene Interconnection,” Journal of the Electrochemical Society, vol. 147, No. 10, pp. 3907-3913, 2000.
Micro)n Technology, Inc.
Morgan Eileen P.
Perkins Coie LLP
LandOfFree
Retaining rings, and associated planarizing apparatuses, and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Retaining rings, and associated planarizing apparatuses, and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Retaining rings, and associated planarizing apparatuses, and... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2799507