Retainer, exposure apparatus, and device fabrication method

Details Retainer, exposure apparatus, and device fabrication method Retainer, exposure apparatus, and device fabrication method

2007-08-07

2007-08-07

Dang, Hung (Department: 2873)

Optical: systems and elements

Lens

With support

C359S820000, C359S822000

Reexamination Certificate

active

11533663

ABSTRACT:
A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.

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