Retainer, exposure apparatus, and device fabrication method

Optical: systems and elements – Lens – With support

Reexamination Certificate

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C359S820000, C359S822000

Reexamination Certificate

active

11005598

ABSTRACT:
A retainer for holding an optical element having three first grooves includes a first support member that supports the optical element through the first grooves, and a second support member that has three second grooves corresponding to the first grooves, and supports the first support member through the second grooves.

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