Retainer, exposure apparatus, and device fabrication method

Details Retainer, exposure apparatus, and device fabrication method Retainer, exposure apparatus, and device fabrication method

2006-04-18

2006-04-18

Ben, Loha (Department: 2873)

Optical: systems and elements

Lens

With support

C359S822000, C359S824000, C359S846000, C359S849000, C359S291000, C359S298000

Reexamination Certificate

active

07031082

ABSTRACT:
A retainer for holding an optical element includes a detector for detecting a deformation amount of the optical element, and an adjustment unit for adjusting the deformation of the optical element based on the deformation amount.

REFERENCES:
patent: 5917647 (1999-06-01), Yoon
patent: 6275326 (2001-08-01), Bhalla et al.
patent: 6386714 (2002-05-01), Eggleton et al.
patent: 6411426 (2002-06-01), Meehan et al.
patent: 6700715 (2004-03-01), Sorg et al.
patent: 6840638 (2005-01-01), Watson
patent: 6842277 (2005-01-01), Watson
patent: 11-149029 (1999-06-01), None

Affiliated with

Also associated with

Rating

Retainer, exposure apparatus, and device fabrication method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Retainer, exposure apparatus, and device fabrication method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Retainer, exposure apparatus, and device fabrication method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3592477