Restricted ion source of high current density

Details Restricted ion source of high current density Restricted ion source of high current density

1983-12-15

1985-01-01

Smith, Alfred E.

Radiant energy

Ion generation

Field ionization type

250396R, H01J 2702

Patent

active

044917350

ABSTRACT:
Means are provided to produce plasma in a chamber. A diaphragm having an externally small aperture permits ions to flow out of the chamber. The ions are focused to produce an ion beam of high current density in a very small area.

REFERENCES:
patent: 3155593 (1964-11-01), Warnecke et al.
patent: 3845305 (1974-10-01), Liebl
patent: 3937958 (1976-02-01), Rusch et al.
patent: 4267457 (1981-05-01), Nakagawa et al.

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