Restoration of high infrared sensitivity in extrinsic silicon de

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 148 15, 148186, H01L 21225

Patent

active

044160518

ABSTRACT:
A method and apparatus for removing heavy metal impurities such as gold, silver, nickel and copper from a crystalline substrate is described incorporating a damaged crystalline layer which may be formed by excessive doping to trap or getter heavy metal impurities to enhance the majority carrier lifetime of the detector material.
The invention overcomes the problem of degraded responsivity in radiant energy crystalline detectors after high temperature processing, in excess of 900.degree. C., which permits surface contaminants such as gold, silver, nickel and copper to diffuse through the detector material raising the net donor density.

REFERENCES:
patent: 3449177 (1969-06-01), Huth et al.
patent: 3791884 (1974-02-01), Dathe et al.
patent: 4053335 (1977-10-01), Hu
patent: 4115798 (1978-09-01), Platzoeder

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