Restoration of high infrared sensitivity in extrinsic silicon de

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357 29, 357 88, 357 64, H01L 2714

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042465907

ABSTRACT:
A method and apparatus for removing heavy metal impurities such as gold, silver, nickel and copper from a crystalline substrate is described incorporating a damaged crystalline layer which may be formed by excessive doping to trap or getter heavy metal impurities to enhance the majority carrier lifetime of the detector material.
The invention overcomes the problem of degraded responsivity in radiant energy crystalline detectors after high temperature processing, in excess of 900.degree. C., which permits surface contaminants such as gold, silver, nickel and copper to diffuse through the detector material raising the net donor density.

REFERENCES:
patent: 3978509 (1976-08-01), Gouin et al.
patent: 4053335 (1977-10-01), Hu
patent: 4115798 (1978-09-01), Platzoeder

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