Resonator-type microelectronic pressure sensor that...

Details Resonator-type microelectronic pressure sensor that... Resonator-type microelectronic pressure sensor that...

2005-11-22

2005-11-22

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

Reexamination Certificate

active

06966228

ABSTRACT:
A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (27) and the baseplate (26) are made completely or almost completely out of the same material as the resonator (23), and the pressure (Pe) to be detected is applied all around the package.

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