Resonator system such as a microresonator system and method...

Details Resonator system such as a microresonator system and method... Resonator system such as a microresonator system and method...

2011-03-22

2011-03-22

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S199000, C333S187000

Reexamination Certificate

active

07911296

ABSTRACT:
A resonator system such as a microresonator system and a method of making same are provided. In at least one embodiment, a mechanical circuit-based approach for boosting the Q of a vibrating micromechanical resonator is disclosed. A low Q resonator is embedded into a mechanically-coupled array of much higher Q resonators to raise the functional Q of the composite resonator by a factor approximately equal to the number of resonators in the array. The availability of such a circuit-based Q-enhancement technique has far reaching implications, especially considering the possibility of raising the functional Q of a piezoelectric resonator by merely mechanically coupling it to an array of much higher Q capacitively-transduced ones to simultaneously obtain the most attractive characteristics of both technologies: low impedance from the piezo-device and high-Q from the capacitive ones. Furthermore, the manufacturing repeatability of such micromechanical resonator-based products is enhanced.

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