Resonator and filter using the same

Details Resonator and filter using the same Resonator and filter using the same

2005-08-02

2008-11-25

Lee, Benny (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C333S189000, C333S191000, C310S324000

Reexamination Certificate

active

07456707

ABSTRACT:
An acoustic resonator includes: a substrate; a resonator film which is supported above the main surface of the substrate and includes a piezoelectric film and a pair of a top electrode and a bottom electrode which are formed on part of the top surface and part of the bottom surface of the piezoelectric film, respectively, to face each other via the piezoelectric film; and a support which is formed on the main surface of the substrate to support the resonator film from below. A resonance cavity is provided in part of a region between the substrate and the resonator film below at least a portion of part of the resonator film where the top electrode and the bottom electrode coincide with each other and an isolation cavity is provided in other part of said region where the support and the resonance cavity do not exist.

REFERENCES:
patent: 5162691 (1992-11-01), Mariani et al.
patent: 6384697 (2002-05-01), Ruby
patent: 6635519 (2003-10-01), Barber et al.
patent: 7038559 (2006-05-01), Ruby et al.
patent: 7095298 (2006-08-01), Song et al.
patent: 7227433 (2007-06-01), Ginsburg et al.
patent: 2007/0085633 (2007-04-01), Nakatsuka et al.
patent: 09-064675 (1997-03-01), None
patent: WO 98/16956 (1998-04-01), None

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