Resonating transducer

Measuring and testing – Fluid pressure gauge – Vibration type

Reexamination Certificate

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Reexamination Certificate

active

11030858

ABSTRACT:
A resonating pressure transducer operable to measure an applied pressure by measuring changes in a resonant frequency is disclosed. The pressure transducer comprises a plurality of diaphragms formed in a wafer of semi-conducting material between two layers, wherein each of the diaphragms is divided into a plurality of electrically isolated sections; a cavity in one of the covering layers opposite a corresponding one of the diaphragms, a first via formed through a selected one of the layers enables application of a potential to selected ones of the diaphragm sections; and a second via formed through a selected one of the layers enables transmission of a measure from selected ones of the diaphragm sections.

REFERENCES:
patent: 5450754 (1995-09-01), Biebl et al.
patent: 5473944 (1995-12-01), Kurtz et al.
patent: 6813956 (2004-11-01), Kurtz et al.

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