Resonating structure and method for forming the resonating struc

Details Resonating structure and method for forming the resonating struc Resonating structure and method for forming the resonating struc

1997-02-28

2000-02-08

Noori, Max

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

7386268, 73721, G01B 716

Patent

active

060216751

ABSTRACT:
A force transducer having a semiconductor substrate including a surface defining a recess, such that the recess has a peripheral boundary and a flexible diaphragm connected to the surface along the peripheral boundary to enclose the recess so that the diaphragm moves in response to changes in a force applied thereto. The force transducer also includes a resonant beam connected to the surface adjacent the peripheral boundary. The resonant beam has a frequency of resonation. Movement of the diaphragm in response to changes in the force applied to the diaphragm changes the frequency of resonation of the resonant beam.

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