Resonant probe driving arrangement and a scanning probe...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S316010

Reexamination Certificate

active

06906450

ABSTRACT:
A drive system is provided for a resonating probe device, such as a scanning probe microscope, wherein the amplitude of the drive signal is controlled by feeding back a phase shifted and amplified component of the amplitude of oscillation of the resonating element. Means are provided for electronically enhancing the quality factor of a resonating probe device when operated in a liquid environment. Such enhancement of the quality factor improves the sensitivity of the probe device.

REFERENCES:
patent: 5753814 (1998-05-01), Han et al.
patent: 5910993 (1999-06-01), Aoki et al.
patent: 5955660 (1999-09-01), Honma
patent: 5966053 (1999-10-01), Durig et al.
patent: 6038916 (2000-03-01), Cleveland et al.
patent: 6079254 (2000-06-01), Chen et al.
patent: 2000-28624 (2000-01-01), None

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