Resonant mirror and method of manufacture

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element

Patent

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Details

359224, 359846, 359221, G02B 2608

Patent

active

052334562

ABSTRACT:
A resonant mirror is disclosed which comprises a deflectable mirror generally planar with the stop surface of a substrate. The mirror is suspended adjacent the top surface by at least two supporting elements. At least one supporting element is displaced from an edge of the mirror. The supporting elements, being collinear, define an axis of rotation about which the mirror may oscillate to steer incident light through an angle.

REFERENCES:
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patent: 4302709 (1981-11-01), Tichtinsky
patent: 4317611 (1982-03-01), Petersen
patent: 4368489 (1983-01-01), Stemme et al.
patent: 4421381 (1983-12-01), Ueda et al.
patent: 4662746 (1987-05-01), Hornbeck
patent: 5018256 (1991-05-01), Hornbeck
patent: 5083857 (1992-01-01), Hornbeck

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