Resonant micro-electro-mechanical system with analog driving

Details Resonant micro-electro-mechanical system with analog driving Resonant micro-electro-mechanical system with analog driving

2007-12-11

2007-12-11

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

11195347

ABSTRACT:
A resonant micro-electro-mechanical system includes a microstructure having a mass which is free to oscillate in accordance with a predetermined degree of freedom, and a driving device coupled to the mass for maintaining the mass in oscillation at a resonance frequency. The driving device includes a differential sense amplifier supplying first signals indicative of a velocity of oscillation of the mass, and an actuation and control stage supplying second signals for driving the mass on the basis of the first signals. The driving device moreover includes a filtering circuit of a high-pass type, which is connected between the differential sense amplifier and the actuation and control stage, and has a bandpass that includes the resonance frequency.

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