Measuring and testing – Fluid pressure gauge – Vibration type
Patent
1985-03-08
1986-09-30
Powell, William A.
Measuring and testing
Fluid pressure gauge
Vibration type
73715, 73754, 156628, 156630, 156633, 156634, 156647, 156656, 156657, 156651, 156662, G01L 1100, H01L 21306, B44C 122, C23F 102
Patent
active
046141197
ABSTRACT:
A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates, joining the substrates face-to-face, and etching away unwanted material to free the resonant hollow beam sensors.
REFERENCES:
patent: 4071838 (1978-01-01), Block
patent: 4293373 (1981-10-01), Greewood
patent: 4472239 (1984-09-01), Johnson et al.
patent: 4507170 (1985-03-01), Myhre
Morrison, Jr. Richard H.
Senturia Stephen D.
Zavracky Paul M.
Martin Terrence
Meyer William E.
Powell William A.
The Foxboro Company
Wu Jack H.
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