Resonant element force transducer for acceleration sensing

Details Resonant element force transducer for acceleration sensing Resonant element force transducer for acceleration sensing

1987-11-05

1988-11-15

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310323, 310370, 310367, 73517AV, 7386259, H01L 4108

Patent

active

047852151

ABSTRACT:
A resonant element force transducer comprising a doubled back beam comprising a single transducer element having a crossmember to one side of which there extends integrally formed therewith at least a pair of coplanar outer beams of substantially equal length and at least one inner beam coplanar with and disposed between the outer beams in substantially parallel fashion, the free ends of the outer beams being coupled to one of a first mounting pad and a second mounting pad, the free end of the at least one inner beam being coupled to the other of the first and second mounting pads.

REFERENCES:
patent: 4221131 (1980-09-01), Albert
patent: 4321500 (1982-03-01), Paros
patent: 4372173 (1983-02-01), Fer Nisse et al.
patent: 4445065 (1984-04-01), Albert
patent: 4450378 (1984-05-01), Hermann et al.
patent: 4517841 (1985-05-01), Peters et al.
patent: 4538461 (1985-09-01), Juptner et al.
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4724351 (1988-02-01), Eer Nisse et al.
patent: 4742260 (1988-05-01), Shimizu et al.

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