Resonant circuit, method of producing same, and electronic...

Details Resonant circuit, method of producing same, and electronic... Resonant circuit, method of producing same, and electronic...

2009-06-17

2011-10-11

Summons, Barbara (Department: 2817)

Wave transmission lines and networks

Coupling networks

Electromechanical filter

C331S115000, C331S1160FE, C331S154000, C438S048000

Reexamination Certificate

active

08035462

ABSTRACT:
A resonant circuit includes a substrate; a MEMS resonator including a fixed electrode and a movable electrode formed above the substrate and having a first terminal and a second terminal, the movable electrode having a movable portion opposing at least a part of the fixed electrode; and a voltage applying unit applying a bias voltage to the MEMS resonator, the voltage applying unit including a voltage divider circuit that includes a compensation resistance formed of a same layer as that of the movable portion to allow a resistance value to be changed by a thickness of the layer and a reference resistance formed of a layer different from that of the movable portion and connected to the compensation resistance to output a junction potential between the compensation resistance and the reference resistance to at least one of the first and the second terminals of the MEMS resonator.

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