Resonant cavity enhanced device and a method for fabricating...

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C250S338100, C250S339110, C250S341800

Reexamination Certificate

active

07541584

ABSTRACT:
A detector device for detecting incident radiation at particular wavelengths is disclosed. The device includes a base layer comprising a substrate. A resonant cavity is formed on the base layer between a pair of reflectors. One reflector is formed by a first reflector layer disposed in fixed relationship with respect to the base layer and the other reflector is formed by a second reflector layer disposed on a membrane in substantially parallel relationship to the substrate. A detector is provided within the cavity to absorb incident radiation therein for detection purposes. By placing the absorbing layer of the detector within the resonant cavity, high quantum efficiency can be achieved using very thin absorbing layers, thus significantly reducing the detector volume and hence noise. Various different arrangements of the detector device and different methods of fabricating the same are also disclosed.

REFERENCES:
patent: 5550373 (1996-08-01), Cole et al.
patent: 6013912 (2000-01-01), Pautrat et al.
patent: 6148016 (2000-11-01), Hegblom
patent: 6380531 (2002-04-01), Sugihwo et al.
patent: 6400738 (2002-06-01), Tucker et al.
patent: 6590710 (2003-07-01), Hara et al.
patent: 6875975 (2005-04-01), Faska et al.
patent: 2001/0052566 (2001-12-01), Hwang et al.
patent: 2002/0048301 (2002-04-01), Wang et al.
patent: 2004/0070768 (2004-04-01), McDaniel et al.
patent: 0 843 364 (1998-05-01), None
patent: 1 126 256 (2001-08-01), None
patent: 1 126 256 (2001-08-01), None
patent: 1 204 148 (2002-05-01), None
patent: 2000-031510 (2000-01-01), None
patent: 02/075263 (2002-09-01), None
Supplementary European Search Report for EP 03 78 3853.9, May 23, 2007.
A. Dehe et al. “III-V Compound semiconductor micromachined actuators for long resonator tunable Fabry-Perot detectors”, Elsevier Sensors and Actuators A 68 (1998) pp. 365-371.
Examination Report dated Jun. 4, 2008 in European Application No. 03 783 853.9.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Resonant cavity enhanced device and a method for fabricating... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Resonant cavity enhanced device and a method for fabricating..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resonant cavity enhanced device and a method for fabricating... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4063686

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.