Coherent light generators – Particular active media – Semiconductor
Reexamination Certificate
2006-01-31
2006-01-31
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Semiconductor
C372S050120, C372S050121, C372S050124
Reexamination Certificate
active
06993055
ABSTRACT:
The specification discloses a resonant cavity device array for wavelength division multiplexing and the method for fabricating it. The structure of the resonant cavity device is selectively formed with an oxide structure, which contains more than one AlxGa1-xAs oxide tuning layer. After the oxidation of AlGaAs, AlGaO is formed to change the refractive index and the thickness, thereby changing and controlling the wavelength of the resonant cavity device. The wavelength variant of each resonant cavity device is determined by the number of layers, thicknesses and compositions of the AlxGa1-xAs oxide tuning layer contained in the selective oxide structure.
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Kovsh Alexey R.
Maleev Nikolai A.
Sakharov Alexey V.
Wang Jyh-Shyang
Wu Yi-Tsuo
Birch & Stewart Kolasch & Birch, LLP
Harvey Minsun Oh
Industrial Technology Research Institute
Menefee James
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