Resonant-bridge two axis microaccelerometer

Details Resonant-bridge two axis microaccelerometer Resonant-bridge two axis microaccelerometer

1989-01-30

1990-02-20

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73DIG1, G01P 1510

Patent

active

049015702

ABSTRACT:
A resonant bridge two-axis microaccelerometer is disclosed comprising polysilicon resonant bridges orthogonally attached to a silicon proof mass, such that the silicon proof mass is suspended by the resonant bridges. Acceleration in the plane of the substrate causes differential axial loads on the opposing microbridges in each pair, thereby shifting their resonant frequencies. The acceleration component aligned with a pair is measured by the difference in resonant frequencies.

REFERENCES:
patent: 3382724 (1968-05-01), Wilcox
patent: 3541866 (1970-11-01), Mathey et al.
patent: 4517841 (1985-05-01), Peters et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 4748848 (1988-07-01), Scholl et al.
patent: 4805456 (1989-02-01), Howe et al.

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