Resonant accelerometer with flexural lever leverage system

Details Resonant accelerometer with flexural lever leverage system Resonant accelerometer with flexural lever leverage system

1998-05-06

1999-10-19

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351429, 7351436, G01P 1509

Patent

active

059692499

ABSTRACT:
An accelerometer comprises a proof mass, a first resonant tuning fork connected to the proof mass, a second resonant tuning fork connected to the proof mass, and a flexural lever leverage system supporting the proof mass above a substrate. The flexural lever leverage system enhances an acceleration force applied to the proof mass to cause a tensile force in the first resonant tuning fork which raises its resonant frequency, and a compressive force in the second resonant tuning fork which lowers its resonant frequency. The device may be fabricated using semiconductor-based surface-micromachining technology.

REFERENCES:
patent: 4930351 (1990-06-01), Macy et al.
patent: 5265473 (1993-11-01), Funabashi
patent: 5396144 (1995-03-01), Gupta et al.
patent: 5408119 (1995-04-01), Greiff
patent: 5792953 (1998-08-01), Kaneko et al.

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