Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-12-12
1999-08-31
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350414, G01P 904
Patent
active
059455993
ABSTRACT:
A resonance type angular velocity sensor is provided with a mass displacement supporting beam (20, 21, 22, 23) for supporting a vibration in a detecting direction due to a Coriolis force of a mass portion (1) and a mass excitation supporting beam for supporting a mass displacement supporting base portion (24, 25) in such a manner as to allow the mass portion (1) to vibrate away from the beam in an excitation direction. When the mass displacement supporting base portion (24) is excited in the excitation direction by an opposing comb exciting electrode (51), the mass portion (1) vibrates. A projecting electrode (31) is provided in a side surface of the Coriolis force detecting direction of the mass portion (1) and capacity detecting electrodes (30, 32) are disposed in such a manner as to oppose this. When the Coriolis force acts on the mass portion (1) vibrating in the excitation direction, the mass portion (1) vibrates also in the detecting direction so that the capacity change is detected by the capacity detecting electrodes (30, 32). In such a case, it is possible to provide a mechanism for applying a stress to the beam members (10, 11, 12, 13, 14, 15, 16, 17) so as to adjust the exciting frequency.
REFERENCES:
patent: 5473945 (1995-12-01), Greiff et al.
patent: 5515724 (1996-05-01), Greiff et al.
patent: 5656778 (1997-08-01), Roszhart
patent: 5721377 (1998-02-01), Kurle et al.
patent: 5728936 (1998-03-01), Lutz
J. Bernstein, et al., "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope", 1993 IEEE: pp. 143-148.
K. Tanaka, et al., "A Micromachined Vibrating Gyroscope", 1995 IEEE: pp. 278-281.
Fujitsuka Norio
Fujiyoshi Motohiro
Nonomura Yutaka
Omura Yoshiteru
Chapman John E.
Kabushiki Kaisha Toyota Chuo Kenkyusho
LandOfFree
Resonance type angular velocity sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Resonance type angular velocity sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resonance type angular velocity sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2426856