Resonance scanner

Details Resonance scanner Resonance scanner

2005-12-13

2005-12-13

Phan, James (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S199200

Reexamination Certificate

active

06975442

ABSTRACT:
A resonance scanner, wherein a frame (3), a drive plate (4), a mirror (5) and torsion springs (6, 7) form an actuator part (1), said drive plate (4) being attached within the frame (3) by two first torsion springs (6) such that the drive plate (4) can oscillate about a common first axis of torsion (8) of both torsion springs (6), said mirror (5) being attached within the drive plate (4) by two second torsion springs (7) such that the mirror (5) can oscillate about a common second axis of torsion (9) of both torsion springs (7), and said first axis of torsion (8) and said second axis of torsion (9) being parallel to each other; wherein, further, only the frame (3) of the actuator part (1) is attached to side walls (10) of a box-shaped stator part (2), a drive means (stator electrodes15or coil24) is arranged at a bottom (11) of the stator part (2) only in the region of the geometrical surface area of the drive plate (4) and said bottom (11) has a recess (13) in the region of the geometrical surface area of the mirror (5), which recess (13) is dimensioned at least such that a maximum mechanical deflection of the mirror (5) is not limited by the bottom (11), said drive means (stator electrodes15or coil24) applying a force only directly to the drive plate (4) and said force following a periodic function, whose period is tuned to the eigenfrequency of the mirror (5), which differs from the eigenfrequency of the drive plate (4).

REFERENCES:
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patent: 7-92409 (1995-04-01), None
patent: WO 98/44571 (1998-10-01), None

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