Resonance method for determining the spring constant of...

Details Resonance method for determining the spring constant of... Resonance method for determining the spring constant of...

2008-09-09

2008-09-09

Chapman, John E (Department: 2856)

Measuring and testing

Vibration

Resonance, frequency, or amplitude study

C073S001820, C073S105000

Reexamination Certificate

active

11458000

ABSTRACT:
In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a microelectromechanical system (MEMS) actuator may be determined in-situ using a frequency resonance method.

REFERENCES:
patent: 6145374 (2000-11-01), Zypman Niechonski et al.
patent: 6799464 (2004-10-01), Guerra-Vela et al.
patent: 2006/0267596 (2006-11-01), Cumpson

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