Resolution standard for scanning electron microscope comprising

Details Resolution standard for scanning electron microscope comprising Resolution standard for scanning electron microscope comprising

1980-07-28

1982-06-15

Rutledge, L. Dewayne

Stock material or miscellaneous articles

All metal or with adjacent metals

Having magnetic properties, or preformed fiber orientation...

428663, 428670, 428687, 250304, 250311, H01F 100, G01N 3100

Patent

active

043351891

ABSTRACT:
A resolution standard for a scanning electron microscope has clusters of palladium in a sea urchin form. The clusters are widely scattered on a substrate so that a cluster can be acquired easily for a resolution test. The tips of the spines on the clusters are on the order of 50 Angstroms and they present a sharp clear image to an electron microscope that is operating properly. A process for forming the clusters is also disclosed.

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patent: 4148294 (1979-04-01), Scherber et al.
patent: 4235226 (1980-11-01), Scherber et al.
Kaiser, H. D., Pakulski, F. J. and Schmeckenbecker, A. F., "A Fabrication Technique for Multilayer Ceramic Modules," Solid State Technology, May 1972, pp. 35-40.
Backovic, N., Jancic, M., Radonjic, L. J., "Study of Electroless Ni-P Depositions on Aluminum," presented at 2nd Balkan Congress on Electron Microscopy, Istanbul, Turkey, Sep. 25-30, 1977, paper E-91.
Hedgecock, N., Tung, P., Schlesinger, M., "On the Structure and Electrical Properties of Electroless Ni-B Films", Journal of Electrochemical Society, vol. 122, No. 7, (Jul. 1975), pp. 866-869.
NBS SRM-484, Magnification Standard Reference Material, NBS RM-100 Resolution Test Specimens published by Office of Standard Reference Materials, National Bureau of Standards, Washington D.C.

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