Resolution enhancement for macro wafer inspection

Details Resolution enhancement for macro wafer inspection Resolution enhancement for macro wafer inspection

2007-02-13

2007-02-13

Allen, Stephone B. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Photocell controlled circuit

C250S559050, C250S559060, C250S559070, C250S559400, C356S431000, C356S237400, C356S237500

Reexamination Certificate

active

10992244

ABSTRACT:
A method and apparatus for improving system resolution for a defect line scanner while not increasing aliasing effects, or alternatively to maintain system resolution for a defect scanner while decreasing aliasing effects. This is accomplished by decreasing effective pixel size for a CCD array defect line scanner while not decreasing signal-to-noise ratio, with minimal changes to the current machine. The method utilizes a sampling phase shift between successive lines of a multi-line sensor array during scanning.

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