Resolution confocal microscope, and device fabrication method us

Details Resolution confocal microscope, and device fabrication method us Resolution confocal microscope, and device fabrication method us

1991-01-03

1992-01-07

Arnold, Bruce Y.

Optical: systems and elements

Compound lens system

Microscope

359368, 359494, 359496, G02B 2100

Patent

active

050784820

ABSTRACT:
A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope.

REFERENCES:
patent: 3914018 (1975-10-01), DeShazer
patent: 4795246 (1989-01-01), Lord
patent: 4802736 (1989-02-01), Gardner et al.
patent: 4845352 (1989-07-01), Benschop
patent: 4964707 (1990-10-01), Hayashi

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