Resolution confocal microscope, and device fabrication method us

Details Resolution confocal microscope, and device fabrication method us Resolution confocal microscope, and device fabrication method us

1989-07-28

1991-04-02

Arnold, Bruce Y.

Radiation imagery chemistry: process, composition, or product th

Post imaging processing

Physical developing

430325, 350507, G02B 2100, G03C 500

Patent

active

050043218

ABSTRACT:
A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope.

REFERENCES:
patent: 3148085 (1964-09-01), Wiegmann
patent: 3258337 (1966-06-01), Cousins
patent: 4697866 (1987-10-01), Howard
patent: 4895423 (1990-01-01), Bilodeau et al.

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