Resistor with side wall contact

Details Resistor with side wall contact Resistor with side wall contact

1990-02-14

1992-01-28

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437 60, 437918, 437924, H01L 21027, H01L 2184

Patent

active

050844202

ABSTRACT:
A resistor located above the semiconductive substrate of an integrated circuit chip can be made smaller than prior art resistors because no area is allocated for resistor contacts. During manufacture, a resistive strip having the width of the intended resistor is formed. A photoresist mask protects the top and sides of the resistive strip where the resistor is located, and etching exposes the ends but not the top and sides of the resistor. Contact to the resistor occurs at the upwardly extending (usually near vertical) end surfaces of the resistor.

REFERENCES:
patent: 3713911 (1973-01-01), Larkin et al.
patent: 4416049 (1983-11-01), McElroy
patent: 4892839 (1990-01-01), Ito et al.

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