Electrical resistors – Plural separate diverse resistors
Patent
1995-11-02
1997-06-03
Walberg, Teresa J.
Electrical resistors
Plural separate diverse resistors
338 24, 338320, 338314, 338260, 338254, 219209, H21C 1216
Patent
active
056358938
ABSTRACT:
A resistor structure (10) having a heating element (35) and a resistor (32), and a method of trimming the resistor (32). The heating element (35) is separated from the resistor (32) by a layer of dielectric material (19). The resistor (32) has a layer of resistive material (23) on an etch control layer (22). The resistor (32) is trimmed by providing current pulses (62) through the heating element (35). Heat generated by the current pulses flows to the resistor (32) and anneals or trims the resistor (32). A resistor trimming variable, e.g. a voltage across resistor contacts (30, 31), is monitored and the current pulses are modulated in accordance with the value of the resistor trimming variable (63). The trimming step is terminated when the desired resistance value of the resistor (32) is attained.
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Abresch Martin J.
Newton William B.
Spraggins Gary L.
Yee Renwin J.
Dover Rennie William
Easthom Karl
Motorola Inc.
Walberg Teresa J.
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