Resistor random access memory cell with L-shaped electrode

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation

Reexamination Certificate

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C257S004000, C257SE21610, C257SE45002, C257SE21003

Reexamination Certificate

active

08080440

ABSTRACT:
A phase change random access memory PCRAM device is described suitable for use in large-scale integrated circuits. An exemplary memory device has a pipe-shaped first electrode formed from a first electrode layer on a sidewall of a sidewall support structure. A sidewall spacer insulating member is formed from a first oxide layer and a second, “L-shaped,” electrode is formed on the insulating member. An electrical contact is connected to the horizontal portion of the second electrode. A bridge of memory material extends from a top surface of the first electrode to a top surface of the second electrode across a top surface of the sidewall spacer insulating member.

REFERENCES:
patent: 3271591 (1966-09-01), Ovshinsky
patent: 3530441 (1970-09-01), Ovshinsky
patent: 4599705 (1986-07-01), Holmberg et al.
patent: 4719594 (1988-01-01), Young et al.
patent: 4876220 (1989-10-01), Mohsen et al.
patent: 5166096 (1992-11-01), Cote et al.
patent: 5166758 (1992-11-01), Ovshinsky et al.
patent: 5177567 (1993-01-01), Klersy et al.
patent: 5389566 (1995-02-01), Lage
patent: 5534712 (1996-07-01), Ovshinsky et al.
patent: 5687112 (1997-11-01), Ovshinsky
patent: 5751012 (1998-05-01), Wolstenholme et al.
patent: 5789277 (1998-08-01), Zahorik et al.
patent: 5789758 (1998-08-01), Reinberg
patent: 5814527 (1998-09-01), Wolstenholme et al.
patent: 5831276 (1998-11-01), Gonzalez et al.
patent: 5837564 (1998-11-01), Sandhu et al.
patent: 5869843 (1999-02-01), Harshfield
patent: 5879955 (1999-03-01), Gonzalez et al.
patent: 5920788 (1999-07-01), Reinberg
patent: 5952671 (1999-09-01), Reinberg et al.
patent: 5970336 (1999-10-01), Wolstenholme et al.
patent: 5985698 (1999-11-01), Gonzalez et al.
patent: 5998244 (1999-12-01), Wolstenholme et al.
patent: 6011725 (2000-01-01), Eitan
patent: 6025220 (2000-02-01), Sandhu
patent: 6031287 (2000-02-01), Harshfield
patent: 6034882 (2000-03-01), Johnson et al.
patent: 6077729 (2000-06-01), Harshfield
patent: 6087674 (2000-07-01), Ovshinsky et al.
patent: 6104038 (2000-08-01), Gonzalez et al.
patent: 6111264 (2000-08-01), Wolstenholme et al.
patent: 6114713 (2000-09-01), Zahorik
patent: 6117720 (2000-09-01), Harshfield
patent: 6147395 (2000-11-01), Gilgen
patent: 6150253 (2000-11-01), Doan et al.
patent: 6153890 (2000-11-01), Wolstenholme et al.
patent: 6177317 (2001-01-01), Huang et al.
patent: 6185122 (2001-02-01), Johnson et al.
patent: 6189582 (2001-02-01), Reinberg et al.
patent: 6236059 (2001-05-01), Wolstenholme et al.
patent: RE37259 (2001-07-01), Ovshinsky
patent: 6271090 (2001-08-01), Huang et al.
patent: 6280684 (2001-08-01), Yamada et al.
patent: 6287887 (2001-09-01), Gilgen
patent: 6314014 (2001-11-01), Lowrey et al.
patent: 6320786 (2001-11-01), Chang et al.
patent: 6339544 (2002-01-01), Chiang et al.
patent: 6351406 (2002-02-01), Johnson et al.
patent: 6420215 (2002-07-01), Knall et al.
patent: 6420216 (2002-07-01), Clevenger et al.
patent: 6420725 (2002-07-01), Harshfield
patent: 6423621 (2002-07-01), Doan et al.
patent: 6429064 (2002-08-01), Wicker
patent: 6462353 (2002-10-01), Gilgen
patent: 6483736 (2002-11-01), Johnson et al.
patent: 6487114 (2002-11-01), Jong et al.
patent: 6501111 (2002-12-01), Lowrey
patent: 6507061 (2003-01-01), Hudgens et al.
patent: 6511867 (2003-01-01), Lowrey et al.
patent: 6512241 (2003-01-01), Lai
patent: 6514788 (2003-02-01), Quinn
patent: 6534781 (2003-03-01), Dennison
patent: 6545903 (2003-04-01), Wu
patent: 6555858 (2003-04-01), Jones et al.
patent: 6555860 (2003-04-01), Lowrey et al.
patent: 6563156 (2003-05-01), Harshfield
patent: 6566700 (2003-05-01), Xu
patent: 6567293 (2003-05-01), Lowrey et al.
patent: 6579760 (2003-06-01), Lung
patent: 6586761 (2003-07-01), Lowrey
patent: 6589714 (2003-07-01), Maimon et al.
patent: 6593176 (2003-07-01), Dennison
patent: 6597009 (2003-07-01), Wicker
patent: 6605527 (2003-08-01), Dennison et al.
patent: 6605821 (2003-08-01), Lee et al.
patent: 6607974 (2003-08-01), Harshfield
patent: 6613604 (2003-09-01), Maimon et al.
patent: 6617192 (2003-09-01), Lowrey et al.
patent: 6621095 (2003-09-01), Chiang et al.
patent: 6627530 (2003-09-01), Li et al.
patent: 6639849 (2003-10-01), Takahashi et al.
patent: 6673700 (2004-01-01), Dennison et al.
patent: 6744088 (2004-06-01), Dennison
patent: 6791102 (2004-09-01), Johnson et al.
patent: 6797979 (2004-09-01), Chiang et al.
patent: 6800563 (2004-10-01), Xu
patent: 6815704 (2004-11-01), Chen
patent: 6861267 (2005-03-01), Xu et al.
patent: 6864500 (2005-03-01), Gilton
patent: 6864503 (2005-03-01), Lung
patent: 6867638 (2005-03-01), Saiki et al.
patent: 6888750 (2005-05-01), Walker et al.
patent: 6894305 (2005-05-01), Yi et al.
patent: 6897467 (2005-05-01), Doan et al.
patent: 6927410 (2005-08-01), Chen
patent: 6933516 (2005-08-01), Xu
patent: 6936840 (2005-08-01), Sun et al.
patent: 6937507 (2005-08-01), Chen
patent: 6969866 (2005-11-01), Lowrey et al.
patent: 6992932 (2006-01-01), Cohen
patent: 7018911 (2006-03-01), Lee et al.
patent: 7321130 (2008-01-01), Lung et al.
patent: 7485891 (2009-02-01), Hamann et al.
patent: 7504653 (2009-03-01), Lung
patent: 7560337 (2009-07-01), Ho et al.
patent: 7606059 (2009-10-01), Toda
patent: 2002/0042158 (2002-04-01), Kersch et al.
patent: 2003/0003647 (2003-01-01), Dennison et al.
patent: 2003/0215978 (2003-11-01), Maimon et al.
patent: 2003/0219924 (2003-11-01), Bez et al.
patent: 2004/0026686 (2004-02-01), Lung
patent: 2004/0114317 (2004-06-01), Chiang et al.
patent: 2004/0248339 (2004-12-01), Lung
patent: 2005/0019975 (2005-01-01), Lee et al.
patent: 2005/0127347 (2005-06-01), Choi et al.
patent: 2005/0215009 (2005-09-01), Cho
patent: 2006/0001174 (2006-01-01), Matsui
patent: 2006/0003263 (2006-01-01), Chang
patent: 2006/0077741 (2006-04-01), Wang et al.
patent: 2006/0110878 (2006-05-01), Lung et al.
patent: 2007/0045605 (2007-03-01), Hsueh
patent: 2007/0045606 (2007-03-01), Magistretti et al.
patent: 2007/0161186 (2007-07-01), Ho
patent: 2009/0298223 (2009-12-01), Cheek et al.
patent: 2010/0291747 (2010-11-01), Lung et al.
patent: 2011/0034003 (2011-02-01), Lung
patent: 0079539 (2000-12-01), None
patent: 0145108 (2001-06-01), None
Adler, D. et al., “Threshold Switching in Chalcogenide-Glass Thin Films,” J. Appl/Phys 51(6), Jun. 1980, pp. 3289-3309.
Adler, David, “Amorphous-Semiconductor Devices,” Sci. Amer., vol. 236, pp. 36-48, May 1977.
Ahn, S. J. et al., “A Highly Manufacturable High Density Phase Change Memory of 64 Mb and Beyond,” IEEE IEDM Dec. 13-15, 2004, pp. 907-910.
Axon Technologies Corporation paper: Technology Description, published at least as early as Dec. 1997, pp. 1-6.
Bedeschi, F. et al., “4-MB MOSFET-Selected Phase-Change Memory Experimental Chip,” IEEE, Sep. 21-23, 2004, 4 PP.
Blake thesis, “Investigation of GeTeSb5 Chalcogenide Films for use as an Analog Memory,” AFIT/GE/ENG/00M-04, Mar. 2000, 121 pages.
Chen, An et al., “Non-Volatile Resistive Switching for Advanced Memory Applications,” IEEE IEDM, Dec. 5-7, 2005, 4 pp.
Cho, S. L. et al., “Highly Scalable On-axis Confined Cell Structure for High Density PRAM beyond 256Mb,” Jun. 14-16, 2005 Symposium on VLSI Technology Digest of Technical Papers, pp. 96-97.
Gill, Manzur et al., “A High-Performance Nonvolatile Memory Technology for Stand-Alone Memory and Embedded Applications,” Feb. 3-7, 2002 IEEE-ISSCC Technical Digest (TD 12.4), 7 pp.
Ha, Y. H. et al., “An Edge Contact Type Cell for Phase Change RAM Featuring Very Low Power Consumption,” Jun. 10-12, 2003 Symposium on VLSI Technology Digest of Technical Papers, pp. 175-176.
Haring Bolivar, P. et al., “Lateral Design for Phase Change Random Access Memory Cells with Low-Current Consumption,” presented at 3rd E PCOS 04 Symposium in Balzers, Principality of Liechtenstein, Sep. 4-7, 2004, 4pp.
Horii, H. et al., “A Novel Cell Technology Using N-doped GeSbTe Films for Phase Change RAM,” Jun. 10-12, 2003 Symposium on VLSI Technology Digest of Technical Papers, pp. 177-178.
Hwang, Y. N. et al., “Full Integration and Reli

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