Resistivity probe fixture

Details Resistivity probe fixture Resistivity probe fixture

1988-12-27

1989-10-10

Raevis, Robert R.

Measuring and testing

Probe or probe mounting

134113, B08B 300

Patent

active

048723568

ABSTRACT:
Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.

REFERENCES:
patent: 2577612 (1951-12-01), Fay
patent: 2626620 (1953-01-01), Smity
patent: 4778532 (1988-10-01), McConnell et al.
patent: 4795497 (1989-01-01), McConnell et al.
patent: 4806912 (1989-02-01), Clack

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