Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting
Patent
1999-05-26
2000-09-05
Gellner, Michael L.
Electrical resistors
Resistance value responsive to a condition
Gas, vapor, or moisture absorbing or collecting
73 3105, H01L 700
Patent
active
061149438
ABSTRACT:
Systems and methods are described for providing a hydrogen sensing element with a more robust exposed metallization by application of a discontinuous or porous overlay to hold the metallization firmly on the substrate. An apparatus includes: a substantially inert, electrically-insulating substrate; a first Pd containing metallization deposited upon the substrate and completely covered by a substantially hydrogen-impermeable layer so as to form a reference resistor on the substrate; a second Pd containing metallization deposited upon the substrate and at least a partially accessible to a gas to be tested, so as to form a hydrogen-sensing resistor; a protective structure disposed upon at least a portion of the second Pd containing metallization and at least a portion of the substrate to improve the attachment of the second Pd containing metallization to the substrate while allowing the gas to contact said the second Pd containing metallization; and a resistance bridge circuit coupled to both the first and second Pd containing metallizations. The circuit determines the difference in electrical resistance between the first and second Pd containing metallizations. The hydrogen concentration in the gas may be determined. The systems and methods provide advantages because adhesion is improved without adversely effecting measurement speed or sensitivity.
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Easthom Karl
Gellner Michael L.
Ut-Battelle, L.L.C.
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