Resistive element having a resistivity which is thermally stable

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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427 77, 427101, 445 50, 445 51, 438 20, 438384, C23C 1622, H01J 904

Patent

active

056563302

ABSTRACT:
A resistive element is provided which is used on a cathode conductor side of a field emission type fluorescent display device and made of a hydrogenated amorphous silicon film. Nitride is added during deposition of the hydrogenated amorphous silicon film containing an impurity for controlling resistivity of the film. A method for producing the resistive element and an apparatus therefor are also disclosed.

REFERENCES:
patent: 4668599 (1987-05-01), Yamazaki et al.

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