Resistive element having a resistivity which is thermally stable

Details Resistive element having a resistivity which is thermally stable Resistive element having a resistivity which is thermally stable

1995-03-22

1997-08-12

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

427 77, 427101, 445 50, 445 51, 438 20, 438384, C23C 1622, H01J 904

Patent

active

056563302

ABSTRACT:
A resistive element is provided which is used on a cathode conductor side of a field emission type fluorescent display device and made of a hydrogenated amorphous silicon film. Nitride is added during deposition of the hydrogenated amorphous silicon film containing an impurity for controlling resistivity of the film. A method for producing the resistive element and an apparatus therefor are also disclosed.

REFERENCES:
patent: 4668599 (1987-05-01), Yamazaki et al.

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