Resist removing method and resist removing apparatus

Details Resist removing method and resist removing apparatus Resist removing method and resist removing apparatus

2008-08-15

2011-12-13

Olsen, Allan (Department: 1716)

Cleaning and liquid contact with solids

Processes

Using sequentially applied treating agents

C134S034000, C134S036000, C216S083000, C438S745000, C438S749000

Reexamination Certificate

active

08075702

ABSTRACT:
In an inventive resist removing method, sulfuric acid and hydrogen peroxide water are supplied to a surface of a substrate to remove a resist from the substrate surface. Thereafter, hydrogen peroxide water is supplied to the substrate surface to remove the sulfuric acid from the substrate surface.

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