Resist removing method, and curable pressure-sensitive adhesive,

Details Resist removing method, and curable pressure-sensitive adhesive, Resist removing method, and curable pressure-sensitive adhesive,

1996-11-18

1999-09-28

Lipman, Bernard

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

At least one aryl ring which is part of a fused or bridged...

524450, 524468, C08K 509

Patent

active

059590114

ABSTRACT:
A method for removing a resist pattern formed on a semiconductor wafer, and a curable pressure-sensitive adhesive, adhesive sheets and an apparatus used for the method. The resist-removing method comprising adhering an adhesive tape on an upper surface of a resist pattern formed on an article and peeling off the resist pattern together with the adhesive tape; the curable pressure-sensitive adhesive constituting the adhesive tape, comprising a pressure-sensitive adhesive polymer containing a non-volatile compound having at least one unsaturated double bond in the molecule and having a good affinity with a resist material to be removed; the adhesive sheet comprising a film substrate having formed thereon the curable pressure-sensitive adhesive; and the resist-removing apparatus comprising a means for press-adhering the adhesive tape, a tape-peeling means, and a substrate-washing means.

REFERENCES:
patent: 3971766 (1976-07-01), Ono et al.
patent: 4233395 (1980-11-01), Klupfel et al.
patent: 4374670 (1983-02-01), Slocombe
patent: 4497686 (1985-02-01), Weglin
patent: 4631110 (1986-12-01), Tsumura et al.
patent: 4869767 (1989-09-01), Robinson et al.
patent: 4923919 (1990-05-01), Frazee
patent: 5110388 (1992-05-01), Komiyama et al.
patent: 5466325 (1995-11-01), Mizuno et al.

Affiliated with

Also associated with

Rating

Resist removing method, and curable pressure-sensitive adhesive, does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Resist removing method, and curable pressure-sensitive adhesive,, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Resist removing method, and curable pressure-sensitive adhesive, will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-704222