Resist pipe and resist coating device

Details Resist pipe and resist coating device Resist pipe and resist coating device

2008-03-18

2011-12-06

Tadesse, Yewebdar (Department: 1717)

Coating apparatus

Control means responsive to a randomly occurring sensed...

Responsive to condition of coating material

C118S694000, C118S052000, C118S612000, C118S712000, C073S29000R

Reexamination Certificate

active

08069815

ABSTRACT:
A resist pipe and a resist coating device are provided. Support portions are provided at an inner wall of a resist supply portion towards a cross-sectional center of the resist supply portion from three locations. The support portions are provided at equal intervals at the inner wall, and the leading ends thereof extend to positions at which a circular rod-shaped liquid level sensor portion is nipped by a peripheral surface of the liquid level sensor portion. In this manner, the support portions support the liquid level sensor portion from three directions, and gaps are formed between the liquid level sensor portion and the inner wall of the resist supply portion. The liquid level sensor portion inside the resist supply portion is supported by the support portions such that a sensing portion is substantially in the same plane as an inlet aperture of the resist supply portion.

REFERENCES:
patent: 5656774 (1997-08-01), Nelson et al.
patent: 8-219853 (1996-08-01), None
patent: 9-021677 (1997-01-01), None
patent: 2000-084468 (2000-03-01), None
patent: 2005-136186 (2005-05-01), None

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