Resist oxidizer with catalytic reactor

Details Resist oxidizer with catalytic reactor Resist oxidizer with catalytic reactor

1992-05-14

1993-12-28

Warden, Robert J.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

422171, B01D 5000, B01D 5334

Patent

active

052737233

ABSTRACT:
A catalytic reactor is used in the exhaust tract of a high pressure, high flow rate ozone asher to prevent resist deposit fouling of the exhaust tract.

REFERENCES:
patent: 4248832 (1981-02-01), Aiken et al.
patent: 4407785 (1983-10-01), Pfefferle
patent: 5071485 (1991-12-01), Matthews et al.

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