Resist material for micro-fabrication

Details Resist material for micro-fabrication Resist material for micro-fabrication

1981-02-05

1982-09-14

Hamrock, William F.

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

20415916, 430287, 430296, 525301, 525304, C08F 846

Patent

active

043496474

ABSTRACT:
A resist material for micro-fabrication comprising a polymer in which the polymer backbone has thereon a moiety of the formula (I) ##STR1## wherein R represents a hydrogen atom, an alkyl group, an alkenyl group or an aryl group or an aralkyl group, the resist material being curable by electromagnetic radiation such as electron beams, X-rays or deep ultraviolet light with a wave length of less than about 3000A and being particularly suitable as a micro-fabrication resist material.

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patent: 4092373 (1978-05-01), Siwiec et al.
patent: 4273858 (1981-06-01), Nagsawa et al.

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