Resist image hardening process

Details Resist image hardening process Resist image hardening process

1977-08-08

1978-11-14

Newsome, John H.

Coating processes

With post-treatment of coating or coating material

Chemical agent applied to treat coating

96 351, 96 362, 427 43, 427372R, B05D 306

Patent

active

041256506

ABSTRACT:
Resist images are hardened so that they are flow resistant at elevated temperatures by coating the image with a layer of a quinone-diazide hardening agent and heating the image to cause the agent to react with the resist and form a hardened image.

REFERENCES:
patent: 3278305 (1966-10-01), Laridon et al.
patent: 3459708 (1969-08-01), Stevens
patent: 3502470 (1970-03-01), Delzenne et al.
patent: 3660097 (1972-05-01), Mainthia
patent: 3711287 (1973-01-01), Dunham et al.
patent: 3920483 (1975-11-01), Johnson et al.
IBM Tech. Disc. Bull., vol. 17, No. 11, 4-1976, p. 3270.
IBM Tech. Disc. Bull., vol. 18, No. 5, 10-1976, p. 1395.
Kammlott et al., "J. Electrochem. Soc.", vol. 121, No. 7, Jul. 1974, pp. 930-932.

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