Coating apparatus – With heat exchange – drying – or non-coating gas or vapor... – With housing surrounding or engaging coating means
Patent
1986-11-21
1989-05-09
Beck, Shrive
Coating apparatus
With heat exchange, drying, or non-coating gas or vapor...
With housing surrounding or engaging coating means
118 52, 118320, 118326, 118667, 427422, 165156, 165169, 165 30, 165 64, 134105, 134200, B05C 1100
Patent
active
048278670
ABSTRACT:
A resist developing apparatus comprising a developing tank consisting of a top portion, a body portion, and a bottom portion, at least one of the top, body, and bottom portions being comprised of an inner wall and an outer wall, a heat exchange chamber being defined between the inner and outer walls for being supplied with a heating medium; a chuck disposed inside the developing tank for holding a work piece in position, a nozzle for spraying chemical liquid toward the work piece held in position by the chuck; a heating medium supply unit for supplying heating medium at a specified temperature to the heat exchange chamber; and piping connecting between the heating medium supply unit and the heat exchange chamber, whereby the interior of the developing tank is adapted to be controlled to a specified temperature.
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PTO, English translation of Japanese patent 57-166032, Jun. 1987.
PTO, English translation of Japanese patent 56-98826, Jun. 1987.
Electrical Communication, vol. 58, No. 1, 1983, pp. 57-58, Heidenheim, DE; "Constant Temperature Developer".
Funatsu Tsunemasa
Takei Toshitaka
Bashore Alain
Beck Shrive
Daikin Industries Ltd.
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