Resin encapsulated semiconductor device and the production...

Active solid-state devices (e.g. – transistors – solid-state diode – Lead frame – With structure for mounting semiconductor chip to lead frame

Reexamination Certificate

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Details

C257S712000

Reexamination Certificate

active

07372132

ABSTRACT:
A semiconductor device having both high strength and high thermal radiation that is capable of being applied to mounting on automobiles experiencing many thermal cycles, and a manufacturing method thereof are provided. A circuit board1afor a resin encapsulated semiconductor module device has a configuration where a silicon nitride plate2with a thickness of 0.635 mm has copper plates of 1.0 mm and 0.8 mm bonded to both sides thereof via active metal. A copper plate3ais bonded to the surface side of the silicon nitride plate2,and a prescribed circuit pattern is formed on the copper plate3a.Tin-silver-copper cream solder layers4aand4bwith a thickness of 200 μm are formed at a prescribed location on the circuit pattern3aon which a semiconductor element6is mounted and at a prescribed location of a base plate1on which the circuit board1ais disposed. Nickel particles5having a maximum particle size of 100 μm and an average particle size of 70 μm are dispersed in the solder4aon the base plate1of good thermal conductivity. A semiconductor element (chip)6,the circuit board1a,and the base plate1are disposed on predetermined locations. Thereafter, they are set in a reflow oven (not shown in the drawings) for reflow soldering. After the inside of the reflow oven is replaced by a nitrogen atmosphere, the reflow oven is heated to 280° C. At the time when solder is melted, the inside of the oven is decompressed to 1 Pa, nitrogen is introduced, and the reflow oven is cooled to about room temperature, thereby completing the solder bonding step. After flux is washed, an outer case7with an insert-molded outlet terminal8is adhered to the base plate1and a predetermined connection is conducted via an aluminum bonding wire9.Then, silicone gel10is injected into a package delimited via the base plate1and the outer case7,and the silicone gel10is heat-hardened, thereby completing a resin encapsulated semiconductor device A.

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