Replaceable shielding apparatus

Details Replaceable shielding apparatus Replaceable shielding apparatus

2006-10-03

2006-10-03

Edwards, Laura (Department: 1734)

Coating apparatus

Gas or vapor deposition

Having means to expose a portion of a substrate to coating...

C118S503000, C118S504000, C118S505000

Reexamination Certificate

active

07115169

ABSTRACT:
A replaceable shielding apparatus provides a cost effective way of shielding a portion of a workpiece during processing. The apparatus includes a replaceable shield, made of comparable weight as the workpiece for allowing replacement of the shield in the same way as the replacement of the workpiece. With this feature, the replacement of the shield is a routine process and would not interfere much with the workpiece operation. The invention further includes a shield clamp for clamping the shield onto the workpiece. In a preferred embodiment, the invention further includes a non-reactive gas inlet for creating a pressurized cavity in the vicinity of the shielded portion of the workpiece.

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