Replaceable probe apparatus for probing semiconductor wafer

Details Replaceable probe apparatus for probing semiconductor wafer Replaceable probe apparatus for probing semiconductor wafer

2005-08-31

2009-12-01

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S758010

Reexamination Certificate

active

07626404

ABSTRACT:
A probe apparatus for probing a device on a semiconductor wafer to be tested by a testing equipment is provided. The probe apparatus includes a replaceable probe tile removably mounted in a probing location on a base plate. The probe tile is configured into a self-contained assembly which includes a chassis body containing a plurality of probes for probing devices on a wafer, a dielectric block for supporting the probes, and a wireguide for guiding a plurality of cables from the testing equipment into the chassis body. A wafer station having replaceable base plates and replaceable probe tiles are also provided.

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