Drying and gas or vapor contact with solids – Apparatus – Trays or floors
Reexamination Certificate
2004-12-09
2009-02-03
Gravini, S. (Department: 3743)
Drying and gas or vapor contact with solids
Apparatus
Trays or floors
C261S023100, C118S726000, C427S248100
Reexamination Certificate
active
07484315
ABSTRACT:
A replaceable precursor tray for use with a high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system is configured to be coupled to the process chamber of a thin film deposition system, and it includes a base tray with one or more stackable upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.
REFERENCES:
patent: 3801294 (1974-04-01), Schultz et al.
patent: 4190965 (1980-03-01), Erickson
patent: 4817557 (1989-04-01), Diem et al.
patent: 4948623 (1990-08-01), Beach et al.
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 5914001 (1999-06-01), Hansen
patent: 6024915 (2000-02-01), Kume et al.
patent: 6270839 (2001-08-01), Onoe et al.
patent: 6380080 (2002-04-01), Visokay
patent: 6544345 (2003-04-01), Mayer et al.
patent: 6897160 (2005-05-01), Derderian et al.
patent: 6921062 (2005-07-01), Gregg et al.
patent: 2002/0013052 (2002-01-01), Visokay
patent: 2002/0187632 (2002-12-01), Marsh
patent: 2003/0053799 (2003-03-01), Lei
patent: 2003/0203617 (2003-10-01), Lane et al.
patent: 2004/0016404 (2004-01-01), Gregg et al.
patent: 2004/0025370 (2004-02-01), Guenther
patent: 2004/0161545 (2004-08-01), Montano et al.
patent: 2004/0206935 (2004-10-01), Miura et al.
patent: 2005/0006799 (2005-01-01), Gregg et al.
patent: 2005/0072357 (2005-04-01), Shero et al.
patent: 2006/0115589 (2006-06-01), Vukoic
patent: 2006/0115590 (2006-06-01), Suzuki et al.
patent: 2006/0220248 (2006-10-01), Suzuki
patent: 2007/0072414 (2007-03-01), Suzuki
patent: 2008/0081473 (2008-04-01), Suzuki
patent: 05-098445 (1993-04-01), None
patent: 06306584 (1997-11-01), None
patent: WO 2004/010463 (2004-01-01), None
patent: WO2004011695 (2004-02-01), None
patent: 2006/058310 (2006-06-01), None
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/988,420, dated Apr. 5, 2007, 7 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Sep. 26, 2007, 6 pp.
U.S. Patent and Trademark Office, Advisory Action in related U.S. Appl. No. 10/998,420, dated Dec. 6, 2007, 3 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 10/998,420, dated Mar. 13, 2008, 6 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/007,961, dated Mar. 6, 2008, 11 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Sep. 11, 2007, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/351,539, dated Apr. 5, 2007, 7 pp.
European Patent Office, International Search Report and Written Opinion, May 4, 2006, 7 pp.
EPO, International Search Report and Written Opinion of the International Searching Authority, International Application No. PCT/US2007/060561, Mailed May 9, 2007, 9 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/537,575, dated May 5, 2008, 10 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Feb. 8, 2008, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Nov. 6, 2007, 3pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Aug. 24, 2007, 12 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Dec. 29, 2006, 11 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/537,575, dated May 5, 2008, 10 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Feb. 8, 2008, 8 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Nov. 6, 2007, 3pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Aug. 24, 2007, 12 pp.
U.S. Patent and Trademark Office, Office Action in related U.S. Appl. No. 11/096,077, dated Dec. 29, 2006, 11 pp.
Taiwanese IPO, Notice of Examination Opinions in related TW Application No. 94143637, dated Mar. 25, 2008, 12 pp.
Guidotti Emmanuel P.
Hara Masamichi
Kuroiwa Daisuke
Leusink Gerrit J.
Suzuki Kenji
Gravini S.
Tokyo Electron Limited
Wood Herron & Evans LLP
LandOfFree
Replaceable precursor tray for use in a multi-tray solid... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Replaceable precursor tray for use in a multi-tray solid..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Replaceable precursor tray for use in a multi-tray solid... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4135153