Replaceable fluid dispensing nozzle

Details Replaceable fluid dispensing nozzle Replaceable fluid dispensing nozzle

1991-12-19

1993-03-23

Jones, W. Gary

Coating apparatus

Projection or spray type

Plural projectors

239600, B05B 700

Patent

active

051960648

ABSTRACT:
A nozzle assembly for use in a semiconductor fabrication liquid dispensing apparatus which dispenses a liquid onto a surface. The nozzle assembly comprises a bulkhead comprised of a non-stick material (such as Teflon.RTM. or similar material) coupled at a first end to a dispensing tube. The nozzle is removable and reusable so that an inventory of replaceable nozzles may be kept on hand for optimum operation of a liquid dispensing apparatus.

REFERENCES:
patent: 4922852 (1990-05-01), Price

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