Replaceable anode liner for ion source

Details Replaceable anode liner for ion source Replaceable anode liner for ion source

2006-05-09

2006-05-09

Wells, Nikita (Department: 2881)

Radiant energy

Ion generation

Electron bombardment type

C250S42300F, C315S111910, C315S111810, C060S202000

Reexamination Certificate

active

07041984

ABSTRACT:
A releasable anode liner that is fitted within the interior of the anode of an ion source. The cover permits electrons to be projected into the anode wherein any insulating deposits adhere to the interior of the anode liner, thereby increasing the effective life of the anode without premature replacement or repair.

REFERENCES:
patent: 4123686 (1978-10-01), Keller et al.
patent: 6064156 (2000-05-01), Patterson et al.
patent: 6765216 (2004-07-01), Kagadei et al.

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