Repairing method of a thin film transistor array

Details Repairing method of a thin film transistor array Repairing method of a thin film transistor array

2006-03-28

2008-11-11

Smoot, Stephen W (Department: 2813)

Semiconductor device manufacturing: process

Repair or restoration

C438S073000, C438S149000, C438S940000, C257SE21475

Reexamination Certificate

active

07449347

ABSTRACT:
A repairing method of thin film transistor array is provided. The repairing method of thin film transistor array can remove a residue between pixel electrodes so as to prevent the residue from electrically connecting pixel electrodes adjacent to each other. The repairing method of thin film transistor array can also be provided to remove a portion of the pixel electrodes above a particle or a defect, which may cause leakage of a storage capacity. The parameters of repairing method of the thin film transistor array precisely controlled and the yield of the thin film transistor array can be effectively improved.

REFERENCES:
patent: 5518956 (1996-05-01), Liu et al.
patent: 6856374 (2005-02-01), Ozaki et al.
patent: 7209194 (2007-04-01), Suzuki et al.
patent: 2004/0179147 (2004-09-01), Kiya et al.

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