Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Patent
1998-02-24
1999-08-03
Young, Christopher G.
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
438 4, 430 30, 430296, 430942, 430966, G03F 900
Patent
active
059323795
ABSTRACT:
The specification describes a technique for repairing wafer fractures that occur during wafer fabrication. The fractured pieces are joined edge-to-edge at the fracture line and bonded with epoxy adhesive. The method succeeds because the dimensions of the fracture line after bonding is within the reregistration tolerance of commercial step-and-repeat cameras and the reregistration capability of the camera allows normal exposure of sites that do not intersect the fracture line.
Burm Jinwook
Hamm Robert Alan
Kopf Rose Fasano
Ryan Robert William
Tate Alaric
Lucent Technologies - Inc.
Young Christopher G.
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